Impurity-impurity interaction during the growth of UMG-Si-based mc-Si
نویسندگان
چکیده
This article investigates the relationship between chemical composition and electrophysical properties of p- n-type multicrystalline silicon ingots based on metallurgical with a purity 99.99 at.%. In particular, role impurity-impurity interactions in production multisilicon by Bridgman vertical method is evaluated order to identify approaches controlling this process effectively. The phase equilibrium calculations “silicon–all impurities” “silicon-impurity-oxygen” systems were carried out Gibbs energy minimization Selector software package. study rank correlations concentrations various impurities each other, as well specified electrical resistivity (SER) lifetime nonequilibrium charge carriers (NCC) direction crystal growth. Pair element distribution profiles considered main factor represented ratio individual impurity solubilities solid or liquid (k0), from standpoint direct interaction two elements. It was found that k0 value for does not automatically lead pair correlation their ingot. A significant effect k0→0 has binding some part into such form can be incorporated easily growing crystal. Binding may induced melt oxygen background, its segregation at grain boundaries, capture crystallization front inclusion. Significant ingot demonstrated pairs whose elements interact without formation compounds 25–1413 °C temperature range. conducted system revealed possibility forming VB2, TiB2, ZrB2, MgTiO4 phases melt.
منابع مشابه
Identification of Vacancy-Impurity Complexes in Highly n-Type Si
We show that the detailed atomic structure of vacancy-impurity complexes in Si can be experimentally determined by combining positron lifetime and electron momentum distribution measurements. The vacancies complexed with a single impurity, V -P and V -As, are identified in electron irradiated Si. The formation of native vacancy defects is observed in highly As-doped Si at the doping level of 10...
متن کاملImpurity–vacancy defects in implanted float-zone and Czochralski-Si
w The dual implantation method developed for defect engineering O.W. Holland, L. Xie, B. Nelson, D.S. Zhou, J. Ž . x q Electron. Mater. 25 1996 99 uses an amorphizing implant in conjunction with high energy Si -ion implantation to inject vacancies. Following annealing of the implanted samples for 20 min at 6008C and at 8008C, the amorphous layer Ž . recrystallizes by solid-phase epitaxial growt...
متن کاملFormation of vacancy-impurity complexes by kinetic processes in highly As-doped Si.
Positron annihilation experiments have been applied to verify the formation mechanism of electrically inactive vacancy-impurity clusters in highly n-type Si. We show that the migration of V-As pairs at 450 K leads to the formation of V-As2 complexes, which in turn convert to stable V-As3 defects at 700 K. These processes manifest the formation of V-As3 as the dominant vacancy-impurity cluster i...
متن کاملVacancy-impurity complexes in highly Sb-doped Si grown by molecular beam epitaxy.
Positron annihilation measurements, supported by first-principles electron-structure calculations, identify vacancies and vacancy clusters decorated by 1-2 dopant impurities in highly Sb-doped Si. The concentration of vacancy defects increases with Sb doping and contributes significantly to the electrical compensation. Annealings at low temperatures of 400-500 K convert the defects to larger co...
متن کاملPerturbative vs non-perturbative impurity scattering in a narrow Si nanowire GAA transistor: A NEGF study
In this paper we study the effect of impurity scattering on the performance of a Si gate-all-around nanowire transistors. The non-equilibrium Green function formalism is used in order to describe the carrier transport. Impurity scattering is introduced using two different formalisms, one that considers the impurity potential as a small perturbation by introducing self energies and the other in ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: ???????? ?????
سال: 2022
ISSN: ['2075-7913']
DOI: https://doi.org/10.21285/2227-2925-2022-12-1-15-29